Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.

For one-semester, undergraduate-level courses in Optoelectronics and Photonics, in the departments of electrical engineering, engineering physics, and materials science and engineering. This text takes a fresh look at the enormous developments in electo-optic devices and associated materials-such as Pockels (Lithium Niobate) modulators.